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Polyethersulfone (PES)
Microelectronics
The FES series filter cartridge is made of hydrophilic PES membrane, which has great heat resistance. The filter cartridge has excellent corrosion resistance and can withstand common acids, alkalis and chemical solvents. It is widely used for fluid filtration in microelectronics.
Features and Benefits
Naturally PES membrane
Long service life and superior dirt-holding capacity
Easy to be wet
Excellent heat resistance makes high temperature sterilization safer and more effective
Application
DI water filtration in advanced semiconductor manufacturing
Terminal filtration in wet cleaning applications of semiconductor
Terminal filtration for acids & alkalis solution
Materials of Construction
Membrane: PES
Cage &Support & End Caps: PP
O-rings/Gasket: Silicone /Viton /EPDM/TEV/ Butyronitrile/ PTFE gasket (hard) / PTFE gasket (soft)
Performance Characteristics
PP＜60℃
PP with stainless steel lined end cap＜85℃
PP with stainless steel lining＜95℃
Positive/Reverse pressure resistance 4bar/2bar (23℃)
pH range：1--14
Filtration Area
≥0.6 m2 /10”
Typical Liquid Flow Rate
Dimensions
Outer Diameter: 68mm/70mm
Length（in）: 10, 20, 30, 40
Removal Ratings (μm)
0.03, 0.1, 0.22, 0.45, 0.8, 1.2
Ordering Information
Series | Rating(μm) | End Cap | Length(in) | Support | Port | Seal |
FES | 003=0.03 | A=222/Fin | 02=2.5" | P=PP | B= Interface lining steel | S= Silicone |
01=0.1 | B=222/Flat | 05=5" | B=PBT | C= Fully lining | E= EPDM | |
022=0.22 | C=226/Fin | 1=10" | V=PVDF | D= Skeleton lining | V= Viton | |
045=0.45 | D=226/Flat | 2=20" | F=PFA | T= TEV | ||
08=0.8 | E=DOE/Flat | 3=30" | M=PE | N=Butyronitrile | ||
1=1.2 | F=215/Fin | 4=40" | G=GF | F=PTFE gasket (hard) | ||
G=215/Flat | M=PTFE gasket (soft) |
The FES series filter cartridge is made of hydrophilic PES membrane, which has great heat resistance. The filter cartridge has excellent corrosion resistance and can withstand common acids, alkalis and chemical solvents. It is widely used for fluid filtration in microelectronics.
Features and Benefits
Naturally PES membrane
Long service life and superior dirt-holding capacity
Easy to be wet
Excellent heat resistance makes high temperature sterilization safer and more effective
Application
DI water filtration in advanced semiconductor manufacturing
Terminal filtration in wet cleaning applications of semiconductor
Terminal filtration for acids & alkalis solution
Materials of Construction
Membrane: PES
Cage &Support & End Caps: PP
O-rings/Gasket: Silicone /Viton /EPDM/TEV/ Butyronitrile/ PTFE gasket (hard) / PTFE gasket (soft)
Performance Characteristics
PP＜60℃
PP with stainless steel lined end cap＜85℃
PP with stainless steel lining＜95℃
Positive/Reverse pressure resistance 4bar/2bar (23℃)
pH range：1--14
Filtration Area
≥0.6 m2 /10”
Typical Liquid Flow Rate
Dimensions
Outer Diameter: 68mm/70mm
Length（in）: 10, 20, 30, 40
Removal Ratings (μm)
0.03, 0.1, 0.22, 0.45, 0.8, 1.2
Ordering Information
Series | Rating(μm) | End Cap | Length(in) | Support | Port | Seal |
FES | 003=0.03 | A=222/Fin | 02=2.5" | P=PP | B= Interface lining steel | S= Silicone |
01=0.1 | B=222/Flat | 05=5" | B=PBT | C= Fully lining | E= EPDM | |
022=0.22 | C=226/Fin | 1=10" | V=PVDF | D= Skeleton lining | V= Viton | |
045=0.45 | D=226/Flat | 2=20" | F=PFA | T= TEV | ||
08=0.8 | E=DOE/Flat | 3=30" | M=PE | N=Butyronitrile | ||
1=1.2 | F=215/Fin | 4=40" | G=GF | F=PTFE gasket (hard) | ||
G=215/Flat | M=PTFE gasket (soft) |
